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Clean rooms are classified according to the number and size
of particles allowed to be present in air inside the cleanroom. Three major
standards are used in the classification of cleanrooms:
US FED STD 209E Cleanroom Standards
Note: The US FED 209E standard was cancelled in 2001 by the General
Services Administration of the US Department of Commerce. However the standard
is still widely used by the industry.
| Class |
maximum particles/ft³ |
ISO
equivalent |
| >=0.1 µm |
>=0.2 µm |
>=0.3 µm |
>=0.5 µm |
>=5 µm |
| 1 |
35 |
7 |
3 |
1 |
|
ISO 3 |
| 10 |
350 |
75 |
30 |
10 |
|
ISO 4 |
| 100 |
|
750 |
300 |
100 |
|
ISO 5 |
| 1,000 |
|
|
|
1,000 |
7 |
ISO 6 |
| 10,000 |
|
|
|
10,000 |
70 |
ISO 7 |
| 100,000 |
|
|
|
100,000 |
700 |
ISO 8 |
ISO 14644-1 Cleanroom standards
| Class |
maximum particles/m³ |
FED STD 209E
equivalent |
| >=0.1 µm |
>=0.2 µm |
>=0.3 µm |
>=0.5 µm |
>=1 µm |
>=5 µm |
| ISO 1 |
10 |
2 |
|
|
|
|
|
| ISO 2 |
100 |
24 |
10 |
4 |
|
|
|
| ISO 3 |
1,000 |
237 |
102 |
35 |
8 |
|
Class 1 |
| ISO 4 |
10,000 |
2,370 |
1,020 |
352 |
83 |
|
Class 10 |
| ISO 5 |
100,000 |
23,700 |
10,200 |
3,520 |
832 |
29 |
Class 100 |
| ISO 6 |
1,000,000 |
237,000 |
102,000 |
35,200 |
8,320 |
293 |
Class 1000 |
| ISO 7 |
|
|
|
352,000 |
83,200 |
2,930 |
Class 10,000 |
| ISO 8 |
|
|
|
3,520,000 |
832,000 |
29,300 |
Class 100,000 |
| ISO 9 |
|
|
|
35,200,000 |
8,320,000 |
293,000 |
Room air |
BS 5295 Cleanroom standards
| |
maximum particles/m³ |
| Class |
>=0.5 µm |
>=1 µm |
>=5 µm |
>=10 µm |
>=25 µm |
| Class 1 |
3,000 |
|
|
|
|
| Class 2 |
300,000 |
|
2,000 |
30 |
|
| Class 3 |
|
1,000,000 |
20,000 |
4,000 |
300 |
| Class 4 |
|
|
200,000 |
40,000 |
4,000 |
The information above has been taken out from different
sources including Wikipedia
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